JPS6231997Y2 - - Google Patents

Info

Publication number
JPS6231997Y2
JPS6231997Y2 JP1980039470U JP3947080U JPS6231997Y2 JP S6231997 Y2 JPS6231997 Y2 JP S6231997Y2 JP 1980039470 U JP1980039470 U JP 1980039470U JP 3947080 U JP3947080 U JP 3947080U JP S6231997 Y2 JPS6231997 Y2 JP S6231997Y2
Authority
JP
Japan
Prior art keywords
insulator
pin
main body
heater
reel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980039470U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56141390U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980039470U priority Critical patent/JPS6231997Y2/ja
Publication of JPS56141390U publication Critical patent/JPS56141390U/ja
Application granted granted Critical
Publication of JPS6231997Y2 publication Critical patent/JPS6231997Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP1980039470U 1980-03-27 1980-03-27 Expired JPS6231997Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980039470U JPS6231997Y2 (en]) 1980-03-27 1980-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980039470U JPS6231997Y2 (en]) 1980-03-27 1980-03-27

Publications (2)

Publication Number Publication Date
JPS56141390U JPS56141390U (en]) 1981-10-26
JPS6231997Y2 true JPS6231997Y2 (en]) 1987-08-15

Family

ID=29634925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980039470U Expired JPS6231997Y2 (en]) 1980-03-27 1980-03-27

Country Status (1)

Country Link
JP (1) JPS6231997Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100755A (ja) * 2003-10-21 2006-04-13 Hitachi Kokusai Electric Inc 基板処理装置並びに基板処理装置用電気ヒーター及びこれを備えた基板処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839291A (en]) * 1971-09-25 1973-06-09
JPS5118966A (ja) * 1974-08-08 1976-02-14 Yamaha Motor Co Ltd Kannomagesochi
AU3186377A (en) * 1976-12-27 1979-06-28 Carborundum Co Fastening insulation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006100755A (ja) * 2003-10-21 2006-04-13 Hitachi Kokusai Electric Inc 基板処理装置並びに基板処理装置用電気ヒーター及びこれを備えた基板処理装置

Also Published As

Publication number Publication date
JPS56141390U (en]) 1981-10-26

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